MEMS mirror

MEMS mirror for optical scanners


Product Name

MEMS mirror for optical scanners


A small optical scanner mirror using MEMS(*) technology, capable of scanning light in two dimensions, which can be used in a wide range of applications such as displays and measurements.

*MEMS is an abbreviation for Micro Electro Mechanical Systems, a device that combines the functions of electricity and machinery. It is a device with both electrical and mechanical functions, and is an attractive advanced technology that can do things that were not possible with the electrical-only LSI.


Mirror diameter φ1.1mm
Horizontal Resonance Frequency 30kHz
Optical Angle of Deflection Horizontal ±20deg, Vertical ±8deg
Driving voltage 1.6V
Power consumption 110mW


・Electromagnetic drive system
・2-axis MEMS mirror
・Horizontal: Resonant drive, Vertical: Non-resonant drive (raster scan)
・Wide optical deflection angle
・Long life and high reliability
・Low voltage drive/low power consumption
・Flat mirror surface


・HUD (Head Up Display)
・Pico Projector
・HMD (Head Mounted Display)
・3D printer
・3DLiDAR etc
 ~It can be used as a mirror for optical scanners for a wide range of applications from displays to industrial use.~


under development