MEMS mirror for optical scanners
A small optical scanner mirror using MEMS(*) technology, capable of scanning light in two dimensions, which can be used in a wide range of applications such as displays and measurements.
*MEMS is an abbreviation for Micro Electro Mechanical Systems, a device that combines the functions of electricity and machinery. It is a device with both electrical and mechanical functions, and is an attractive advanced technology that can do things that were not possible with the electrical-only LSI.
|Horizontal Resonance Frequency||30kHz|
|Optical Angle of Deflection||Horizontal ±20deg, Vertical ±8deg|
・Electromagnetic drive system
・2-axis MEMS mirror
・Horizontal: Resonant drive, Vertical: Non-resonant drive (raster scan)
・Wide optical deflection angle
・Long life and high reliability
・Low voltage drive/low power consumption
・Flat mirror surface
・HUD (Head Up Display)
・HMD (Head Mounted Display)
~It can be used as a mirror for optical scanners for a wide range of applications from displays to industrial use.~