31 May 2023

Started sample shipments of MEMS mirrors with smaller package size for automotive LiDAR applications

Kofu, Japan – YITOA Micro Technology Corporation has begun shipping samples of a new package of MEMS mirrors (CG0006AR) for automotive LiDAR applications.
The New packaged sample is 33% smaller than the previous sample, and sample shipments will begin on June 1, 2023.

YITOA Micro Technology has started MEMS Research and Development in 2011, and has provided MEMS Mirror IC to a specific customer.
This second-generation MEMS Mirror IC, CG0006AR, has been developed by the company’s own technology and equipment, and is expected to be used by customers worldwide.

YITOA Micro Technology is also developing a MEMS mirror with a larger mirror size at the same time, In order to meet the demand for long-distance measurement of LiDAR, and plan to ship samples as soon as the development is completed.

MEMSmirror MEMSmirror


Product Lineup

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Features of CG0006AR

  • Electromagnetic MEMS Mirror for Automotive LiDAR
  • Mirror Diameter: φ3.6×4mm2
  • Dual axis (X and Y)
  • Wide FOV : 60x30°
  • Angular Sensor and Temperature Sensor integrated
  • Package size : 19.2x18.5x6.59mm3


To realize autonomous vehicles, equipping LiDAR (Light Detection And Ranging) to the vehicle is expected. LiDAR is a method for determining ranges (variable distance) by targeting an object or a surface with a laser and measuring the time for the reflected light to return to the receiver. To expand deploying LiDAR to vehicles, there are lots of difficulties with conventional Mechanical way of rotating LiDAR systems. Solid-State LiDAR with MEMS Mirror is expected to realize downsized, low cost, and high reliability products that can popularize LiDAR.
YITOA Micro Technology has been developing MEMS Mirror to realize the Solid-State LiDAR system for years.
Also, the company is developing much more smaller size and lower cost MEMS Mirror for the use in AR Smart Glass, HUD and Pico Projector with Laser Beam Scanning system.


YITOA Micro Technology Corporation
Osato-cho 465, Kofu, Yamanashi 400-0053, JAPAN
Phone : (+81) 55-241-8611
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